Miller Design and Equipment - New and Used Refurbished Equipment for the Semi-conductor Industry
The Micromanipulator Co. Inc.
The Micromanipulator Model 6200 (shown on the left) is an excellent general purpose prober. The 6200 has 6” capacity (standard 5”, optional 6”), and a stout microscope tower capable of supporting Microzoom or Mitutoyo optics, this prober has been around a long time. Probably its biggest weakness, like all similar Micromanipulator models is the belts in their belt driven stage. The wear out and or are susceptible to breaking when the stage has traveled to its limits and is accidentally forced farther. The platen has a fast lift control lever on the left side with 3 locking up positions, and also can lift the microscope out of the way via a vertical adjustable knob. Platen down position is set with a fine control knob to adjust tip height. This platen lift stops are a detent setup and need to be properly lubed and adjusted to eliminate accidental platen drop. The platen has color coded BNC jacks with corresponding jacks at the rear of the station. Two vacuum manifolds are located on each side of the machine at the rear corners. With 6” stage travel, a full 360° rotation in theta, 1” X –Y microscope movement, and fine and course stage controls, this is a well rounded machine. This is a very popular model that has been around a long time and holds it resale value extremely well.
The model 6100 (shown to the right) is the slimmed down little brother to the 6200. Standard 5” (6” optional) chuck, 1” X-Y microscope movement, full 360° theta rotation of the chuck. Where the 6200 has course and fine stage movement, the 6100 only has the coarse (1.7 revolutions per inch) movement, do to the controls being mounted on the outside front of the machine. This model is very similar overall to the 6200, just missing a few options. It is still a very good prober that will offer many years of reliable service.
The 6400 was supposed to be the bigger brother to the 6200, with some modern upgrades. The main one being the co-axial X-Y manual stage control with a joystick controlled motorized stage drive. The co-axial manual control was nice, yet could be confusing for a user who is used to operating Micromanipulator’s other models. With the control (mounted center front like the 6200) you can move X and Y axis of the stage with one hand, you do not need to have a hand on each side for the different axis’.
The motorized driven stage we have was never found to be reliable or worth the trouble they seam to cause. Adding motors to roughly the same old belt drive stage is almost begging for trouble. The belts that Micromanipulator uses, besides being rather expensive, are not necessarily known for their strength anyway. The motors also always seem to surge or pulse and are extremely noisy. Our answer has always been to just remove the motorized system and make a very nice manual prober out of this model. With 6” stage travel, 5” chuck (6” optional), full theta, and microscope movement, it is identical to the 6200 but with the co-axial stage control option. If you want a motorized stage driven prober, this is probably not the route you want to go. But for or a 6” manual wafer prober that used to be motorized, this model is excellent choice.
Probably Micromanipulators biggest seller over the years, the Model 6000 has been around since 1970. A 4” wafer prober with the capability to handle the MicroZoom or Mitutoyo optics, this probe station has a lot to offer for this market. This standard Micromanipulator’s features include: a full 360° degree theta rotation, 1” microscope movement, single hand operation via the co-axial controls located at the front of the machine. The 6000 was originally offered with a motor driven stage option, but like the 6400, we usually remove them for the same reasons.
The Model 6000 was also offered in a 6000-Z7 version, which was set up for StereaZoom 7 microscopes for customers that did not require the higher magnification of the standard model. Overall, model 6000 is a nice prober that has been around a long time, a solid 4” wafer prober that can handle the larger microscopes with higher magnification. If higher magnification was not required, we would probably recommend the Rucker and Kolls Model 260 over the 6000-Z7.
Last modified: 05/06/09